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Interference lithography
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1	Wave and particle in molecular interference lithography Thomas Juffmann,1 Stefan Truppe,1 Philipp Geyer,1 Andr´as G. Major,1, ∗ Sarayut Deachapunya,1, 2 Hendrik Ulbricht,1, 3 and Markus Arndt1 arXiv:1001.0468v1 [quant Add to Reading List Source URL: arxiv.org Language: English - Date: 2010-01-04 05:10:18
2	FRAUNHOFER INSTI TUTE FOR I NTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB General Description Dr.LiTHO is a comprehensive simulation environment for photolithography developed at Fraunhofer IISB. Its main focus is on de Add to Reading List Source URL: www.iisb.fraunhofer.de Language: English - Date: 2015-06-08 13:42:32 Photolithography Semiconductor device fabrication Photoresist Resist Interference lithography Fraunhofer Society Ultraviolet Simulation Computational lithography Materials science Microtechnology Chemistry
3	PDF Document Add to Reading List Source URL: spie.org Language: English - Date: 2015-04-13 10:58:59 Extreme ultraviolet lithography Extreme ultraviolet Microtechnology Immersion lithography Computational lithography Interference lithography Photoresist Photomask College of Nanoscale Science and Engineering Materials science Electromagnetic radiation Technology
4 $Electromagnetic radiation / Photonics / Diffraction grating / Extreme ultraviolet / Grating / Interference lithography / Electron beam lithography / Extreme ultraviolet lithography / Long-period fiber grating / Optics / Diffraction / Optical devices$	Nanostructuring News August 2010 25nm half-pitch EUV fabricated gratings now available Eulitha continues to add higher resolution structures to its line of standard Add to Reading List Source URL: www.eulitha.com Language: English - Date: 2014-05-05 05:11:39 Electromagnetic radiation Photonics Diffraction grating Extreme ultraviolet Grating Interference lithography Electron beam lithography Extreme ultraviolet lithography Long-period fiber grating Optics Diffraction Optical devices
5	SLS Symposium on Nanostructures and Nanoparticles Tuesday, May 13, [removed]:00 to 11:45, WBGB[removed]:00 Surface sensitive measurements on the nanometer scale by means of grazing emission X-ray fluorescence Add to Reading List Source URL: www.psi.ch Language: English - Date: 2015-02-03 08:51:10 Spectroscopy Electromagnetic spectrum X-rays Scattering Extreme ultraviolet lithography Polymer physics Small-angle X-ray scattering X-ray fluorescence Interference lithography Electromagnetic radiation Physics Scientific method
6	PAUL SCHERRER INSTITUT Technology Transfer R&D Services Add to Reading List Source URL: www.psi.ch Language: English - Date: 2014-11-28 07:19:08 Nanoimprint lithography Nanolithography Nanotechnology Photolithography Electron beam lithography Interference lithography Lithography Microelectromechanical systems Microfabrication Materials science Technology Microtechnology
7	PAUL SCHERRER INSTITUT Technology Transfer R&D Services Add to Reading List Source URL: www.psi.ch Language: English - Date: 2014-11-28 07:19:08 Microtechnology Extreme ultraviolet lithography Nanolithography Interference lithography Electron beam lithography Photolithography Nanotechnology Photoresist Extreme ultraviolet Materials science Technology Chemistry
8	F R A U N H O F E R I N S T I T U T e F o R so l ar ener g Y syste m s I S E 1 1 Near field calculation of a micro prism array. The color scheme shows the Add to Reading List Source URL: www.ise.fraunhofer.de Language: English Nanoimprint lithography Interference lithography Lithography Photoresist Materials science Technology Chemistry
9	[removed]February[removed]Technical Summaries Add to Reading List Source URL: spie.org Language: English - Date: 2014-11-20 05:26:27 Technology Extreme ultraviolet Multiple patterning Cymer Inc. Immersion lithography Interference lithography Ultraviolet Hydrogen silsesquioxane Resist Electromagnetic radiation Materials science Extreme ultraviolet lithography
10	PHYSICAL REVIEW E 71, 046605 共2005兲 Photonic band gap templating using optical interference lithography Timothy Y. M. Chan, Ovidiu Toader, and Sajeev John Department of Physics, University of Toronto, 60 St. George Add to Reading List Source URL: www.physics.utoronto.ca Language: English - Date: 2006-04-19 14:45:01 Chemistry Geometry Reciprocal lattice Photonic crystal Crystal structure Density of states Electronic band structure Lattice Linear polarization Condensed matter physics Physics Crystallography

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